Simple Fabrication and Characterization of a Platinum Microhotplate Based on Suspended Membrane Structure
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/s40799-016-0076-y.pdf
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4. Hwang, W.-J., Shin, K.-S., Roh, J.-H., Lee, D.-S., and Choa, S.-H., “Development of micro-heaters with optimized temperature compensation design for gas sensors,” Sensors 11: 2580–2591 (2011).
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