Author:
Palevičius A.,Janušas G.,Čekas E.,Šakalys R.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference21 articles.
1. Steingrüber, R., Ferstl, M., and Pilz, W., “Micro-Optical Element Fabricated by Electron-Beam Lithography and Dry Etching Technique Using Top Conductive Coatings,” Microelectronic Engineering 57–58:285–289 (2001).
2. Ahn, S.W., Lee, K.D., Kim, J.S., et al., “Fabrication of Subwavelength Aluminum Wire Grating Using Nanoimprint Lithography and Reactive Ion Etching,” Microelectronic Engineering 78–79:314–318 (2005).
3. Te Kolste, R.D., Welch, W.H., and Foldman, M.R., “Injection Moulding for Diffractive Optics,” Cindrich, I., and Lee, S.H., (eds), Diffractive and Holographic Optics Technology II. Proc. SPIE 2404, Society of Photo Optical, San Jose, California, USA, pp. 129–131 (1995).
4. Leech, P.W., Lee, R.A., and Brett, A., “Sexton and Fiona Smith Hot Embossing of Micrographic Elements in Polypropylene,” Microelectronic Engineering 84: 109–113 (2007).
5. Lebib, A., Chen, Y., Bourneix, J., et al., “Nanoimprint Lithography for Large Area Pattern Replication,” Microelectronic Engineering 46: 4129–4133 (1999).
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