Molecular dynamic study for nanopatterning using atomic force microscopy-Reference-Cited by-同舟云学术

Molecular dynamic study for nanopatterning using atomic force microscopy

Published:2005-01 Issue:1 Volume:36 Page:169-176
ISSN:1073-5623
Container-title:Metallurgical and Materials Transactions A
language:en
Short-container-title:Metall and Mat Trans A

Author:

Kim Young-Suk,Kim Chan-Il,Park Jun-Young,Na Kyung-Hoan

Publisher

Springer Science and Business Media LLC

Subject

Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1007/s11661-005-0149-5.pdf

Reference24 articles.

1. M. Werner: MST News, Teltow, Germany, 2001.

2. Y. Yan, M. Yoshino, and T. Kuriagawa: Mater. Sci. Eng., 2001, vol. A297, pp. 230–36.

3. P. Rai-Choudhury: Handbook of Microlithography, Micromachining, and Microfabrication, vol. 1, Microlithougraphy, SPIE Optical Engineering Press, Washington, 1997.

4. E.J. Wan Loenen: Appl. Phys. Lett., 1989, vol. 55 (13), pp. 1312–14.

5. H.J. Mamin and D. Rugar: Appl. Phys. Lett., 1992, vol. 61 (8), pp. 1003–05.

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A molecular dynamics study of the effect of impact velocity, particle size and angle of impact of abrasive grain in the Vibration Assisted Nano Impact-machining by Loose Abrasives;Wear;2013-06

2. Deformation characteristics of various grain boundary angles on AFM-based nanolithography using molecular dynamics;Journal of Mechanical Science and Technology;2012-06

3. A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation;Composites Part B: Engineering;2011-04

4. Two-dimensional molecular dynamic simulations on accommodation coefficients in nanochannels with various wall configurations;Computers & Fluids;2010-09

5. Study on Nanolithography Process of Polycrystalline Copper Using Molecular Dynamic Simulation;Key Engineering Materials;2007-06