1. W.D. Westwood, Sputter Deposition (American Vacuum Society, New York, 2003), pp. 203–204
2. K. Wasa, M. Kitabatake, H. Adachi, Thin Film Materials Technology (William Andrew, Norwich, 2004) pp. 191–192
3. M. Ohring, The Materials Science of Thin Films (Academic, San Diego, 1992)
4. R.F. Bunshah, Handbook of Deposition Technologies for Films and Coatings (Noyes Publications, Park Ridge, 1994)
5. N. Tsuda, K. Nasu, A. Yanase, K. Siratori, Electronic Conduction in Oxides (Springer, Berlin Heidelberg New York, 1991)