Virtual Modeling and Optimal Design of Intelligent Micro-accelerometers

Author:

Wiak Slawomir,Cader Andrzej,Drzymala Pawel,Welfle Henryk

Publisher

Springer Berlin Heidelberg

Reference7 articles.

1. Wiak, S.: Intelligent Micro-Electro-Mechanical Systems (IMEMS) - Modelling and Optimal Design. In: AI-METH 2003 - Artificial Intelligence Methods, Gliwice, Poland (2003)

2. OPERA-3D User Guide, Vector Fields Limited, Oxford, England, ver. 9.0 (2004)

3. Wiak, S., Rudnicki, M.: Optimisation and Inverse Problems in Electromagnetism. Kluwer Academic Publisher, Dordrecht (2003)

4. Brown, K.S.: On the Feasibility of Integrated Optical Waveguidebased In-Situ Monitoring of Microelectromechanical Systems (MEMS), dissertation Phd in engineering, Department of Computer Science and Electrical Engineering Morgantown, West Virginia (2000)

5. Tang, W.C., Nguyen, T.-C.H., Judy, M.W., Howe, R.T.: Electrostatic Comb Drive of Lateral Polysilicon Resonators. Sensors and Actuators A 21, 328–331 (1990)

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1. Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures;Computational Methods for the Innovative Design of Electrical Devices;2010

2. Multiobjective Design Optimization of Electrostatic Rotary Microactuators Using Evolutionary Algorithms;Artificial Intelligence and Soft Computing – ICAISC 2006;2006

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