Author:
Kasai Toshi,Bhushan Bharat
Publisher
Springer Berlin Heidelberg
Reference66 articles.
1. Steigerwald JM, Murarka SP, Gutmann RJ (1997) Chemical mechanical planarization of microelectronic materials. Wiley, New York
2. Toenshoff HK, Schmieden WV, Inasaki I, Koenig W, Spur G (1990) CIRP Ann 39:621–636
3. Ahearne E, Byrne G (2004) Proc Inst Mech Eng Part B 218:253–267
4. Bhushan B (1996) Tribology and mechanics of magnetic storage systems, 2nd edn. Springer, New York
5. Bhushan B (ed) (1999) Handbook of micro/nanotribology, 2nd edn. CRC, Boca Raton
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献