1. D. Rudolph et al., in X-Ray Microscopy, edited by G. Schmahl and D. Rudolph ( Springer-Verlag, Berlin 1984 ), p. 192.
2. E. Kratschmer et al., in Proc. Microcircuit Engineering 1983, edited by H. Ahmed, J.R.A. Cleaver, and G.A.C. Jones ( Academic Press, London 1983 ), p. 15.
3. D. Stephani et al., J. Vac. Sci. Technol. B 1 (4), 1011 (1983).
4. V. Bögli et al., in Soft X-Ray Optics and Technology (Berlin 1986), edited by E.E. Koch and G. Schmahl, Proc. SPIE 733, p. 449 (1987).
5. E. Kratschmer et al., in Proc. Microcircuit Engineering 1984, edited by A. Heuberger and H. Beneking ( Academic Press, London 1984 ) p. 15.