1. P.K. Tien: Appl. Opt. 10, 2395 (1971)
2. K.E. Wilson, E. Garmire, R.M. Silva, W.K. Stowell: J. Opt. Soc. Am. 71, 1560 (1981)
3. R. Behrisch (ed.): Sputtering by Particle Bombardment I, Topics Appl. Phys., Vol. 47 ( Springer, Berlin, Heidelberg 1981 )
4. F. Zernike: Fabrication and measurement of passive components, in Integrated Optics, ed. by T. Tamir, 2nd edn., Topics Appl. Phys., Vol. 7 ( Springer, Berlin, Heidelberg 1979 )
5. J.D. Plummer, J.D. Deal, P.B. Griffin: Silicon VLSI Technology ( Prentice Hall, Upper Saddle River, NJ 2000 ) pp. 539–555