Author:
Spengen W.,Modlinski Robert,Puers Robert,Jourdain Anne
Publisher
Springer Berlin Heidelberg
Reference98 articles.
1. W. M. Miller, D. M. Tanner, S. L. Miller, K. A. Peterson: MEMS Reliability. The Challenge and the Promise. In: Proc. 4th Annual “The Reliability Challenge” (Dublin, Ireland 1998) pp. 4.1-4.7
2. M. R. Douglass: DMD reliability. A MEMS success story, Proc. SPIE 4980, 1–11 (2003)
3. J. Bienstman: From product to production in automotive MEMS: In: Proc. MicroMechanics Europe, ed. by R. Puers (Leuven, Belgium 2004) pp. 107-108
4. W. M. van Spengen: MEMS reliability from a failure mechanisms perspective, Microelectron. Reliab. 43, 1049–1060 (2003)
5. W. M. van Spengen, R. Puers, R. Mertens, I. De Wolf: High resolution optical investigation of small out-of-plane movements and fast vibrations; characterization and failure analysis of MEMS, Microsyst. Technol. 10, 89–96 (2004)
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献