1. C. A. Mead and L. A. Conway, Introduction to VLSI Systems, Addison-Wesley, Reading, MA (1980)
2. E. K. Antonsson, “Structured design methods for MEMS,” Final Report on NSF Sponsored Workshop on Structured Design Methods for MEMS, Nov. 12–15, 1995; on-line at http://design.caltech.edu/NSF_MEMS_Workshop
3. C. T.-C. Nguyen, “Frequency-selective MEMS for miniaturized low-power communication devices,” IEEE Trans. Microwave Theory and Technique, 47 (8): 1486–1503 (Aug. 1999)
4. S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, Boston (2000)
5. A. Nathan and H. Baltes, Microtransducer CAD: Physical and Computational Aspects, Springer-Verlag, Wien (1999)