Nano-porous Polysilicon Fabrication for Micro Electro Mechanical System (MEMS) Drug Delivery Device

Author:

Mohmad Salina bt,Chau C. F.,Melvin T.,Atri S.,Kaminski C.

Publisher

Springer Berlin Heidelberg

Reference14 articles.

1. Santini, J. T., Cima, M. J. and Langer, R. (1999) A controlled-release microchip. Nature 397:335–338

2. Canham, L. and Aston, R. (2001) Will a chip everyday keep the doctor away?’ Physics World @ physicsweb.org, July 2001

3. Balagurov, L. A., Bayliss, S. C., Orlov, A. F., Petrova, E. A., Unal, B. and Yarkin, D. G. (2001) Electrical properties of metal/porous silicon/p-Si structures with thin porous silicon layer. J. Appl. Phys. 90:4148–4190

4. Matthai, C. C., Gavartin, J. L. and Cafolla, A. A. (1995) Structural and elastic properties of porous silicon. Thin Solid Films 225:174–176

5. Cullis, A. G., Canham, L. T. and Calcott, P. D. J. (1997) The structural and luminescence properties of porous silicon. J. Appl. Phys. 82(3):910–956

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