A swing-arm on-machine inspection method for profile measurement of large optical surface in lapping process-Reference-Cited by-同舟云学术

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A swing-arm on-machine inspection method for profile measurement of large optical surface in lapping process

Published:2005-08 Issue:8 Volume:19 Page:1576-1581
ISSN:1738-494X
Container-title:Journal of Mechanical Science and Technology
language:en
Short-container-title:J Mech Sci Technol

Author:

Sung In Kyoung,Oh Chang Jin,Lee Eung Suk,Kim Ock Hyun

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/BF03023935.pdf

Reference9 articles.

1. Ando, M., Negishi, M., Takimoto, M., Deguchi, A. and Nakamura, N., 1995, “Super-smooth Polishing on Aspherical Surface,”Nanotechnology 6, pp. 111–120

2. Burge, J, H., 1996, “Measurement of Large Convex Aspheres,”Proc. of SPIE on Optical Telescopes of Today and Tommorrow, Vol. 2871.

3. Daniel Malacara-Hernandcz and Daniel Malacara-Doblado, 1999, “Testing of Aspheric Wavefronts,”Fabrication and Testing of Aspheres, Optical Society of America, pp. 74–85.

4. David Walker, Ho-Soon Yang and Sug-Whan Kim, 2003, “Novel Hybrid Stylus for Nanometric Profilometry for Large Optical Surface,”Optics Express, Vol, 11 No. 15.

5. David Williamson, Robert Kestner and Daniel Bajuk, 1999, “Asphere in Microlithography,”Fabrication and Testing of Aspheres, Optical Society of America, pp. 8–16.

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1. Swing-arm profilometer design for high steepness optical aspheric surfaces;Optical Metrology and Inspection for Industrial Applications X;2023-11-27

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