Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/BF03023932.pdf
Reference14 articles.
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3. Flynn, A. M., Tavrow, L. S., Bart, S. F., Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R. and Cross, L. E., 1992, “Piezoelectric Micro- motors for Microrobots,”Journal of Microelec- tromechanical Systems, Vol. 1, pp. 44–51.
4. Galassi, C., Dinescu, M., Uchino, K. and Sayer, M., 1999,Piezoelectric Materials: Advances in Science, Technology and Applications, Kluwer Academic Publishers.
5. Itoh, T., Lee, C., Sasaki, G. and Suga, T., 1996, “Sol-gel Derived PZT Force Sensor for Scanning Force Microscopy,”Materials Chemistry and Physics, Vol, 44, pp. 25–29.
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