Study and analysis of the piezoresistive accelerometer stability and improvement of their performances

Author:

Ghemari Zine

Publisher

Springer Science and Business Media LLC

Subject

Strategy and Management,Safety, Risk, Reliability and Quality

Reference9 articles.

1. Benmoussaa N et al (2014) Design and modeling of a three-axis piezoresistive microelectronic accelerometer. Phys Procedia 55:106–112

2. Bhattacharyya TK, Roy AL (2014) MEMS piezoresistive accelerometers. In: Vinoy KJ, Ananthasuresh GK, Pratap R, Krupanidhi SB (eds) Micro and smart devices and systems. Springer, India, pp 19–34

3. Chaehoi A (2005) Conception et modélisation de MEMS monolithiques CMOS en technologie FSBM: application aux accéléromètres. PhD thesis in Electronics, Optronics and System, University of Montpellier II

4. Hsieh HS, Chang HC, Hu CF, Cheng CL, Fang W (2011) A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer. J Micromech Microeng 21(10):105006

5. Juanting Z et al (2014) The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology. J Semicond 35(6):1–10

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