1. C. Pellet, C. Schwebel, P. Hesto: Thin Solid Films 175, 23?28 (1989)
2. D. Bouchier, A. Bosseboeuf, G. Gautherin: Proc. of the Symp. on Silicon Nitride and Silicon Dioxide Insulating Films. San Diego, CA, Oct 19?24, 1986, ed by V.J. Kapoor, K.T. Hankins, Electrochemical Soc. Proc., Vol. 87?10 (Electrochemical Soc., New York 1987) p. 527
3. C. Sibran, R. Blanchet, M. Garrigues, P. Viktorovitch: Thin Solid Films 103, 211?219 (1983)
4. D. Bouchier, A. Bosseboeuf, G. Gautherin: Proc. of the Int'l Symp. on Trends and New Applications in Thin Films. Le Vide, les Couches Minces 235, 309 (1987)
5. For a review, see G. Gautherin, D. Bouchier, C. Schwebel: In Thin Films from Free Atoms and Particles, ed. by K.J. Klabunde (Academic, Orlando, FL 1985)