Rapid Prototyping of PDMS Devices Using SU-8 Lithography
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Publisher
Humana Press
Link
http://link.springer.com/content/pdf/10.1007/978-1-62703-134-9_11.pdf
Reference9 articles.
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4. MicroChem (2011) MicroChem Corp. http://www.microchem.com/Prod-SU82000.htm . Accessed 12 Nov 2012
5. Chuang YJ, Tseng FG, Lin WK (2002) Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination. Microsyst Technol 8:308–313
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