1. E.P. Popov: Introduction to the Mechanics of Solids (Prentice Hall, Englewood Cliffs, NJ 1968)
2. American Institute of Physics Handbook, 3rd edn., D.E. Gray (ed.) (McGraw Hill, New York, 1972). K. Peterson: Silicon as a mechanical material. IEEE Proc. 70, 420 (1982)
3. G. Cibuzar: MEMs, in The Science and Engineering of Microelectronic Fabrication, S.A. Campbell (ed.), 2nd edn., (Oxford University Press, New York, 2001) Chap. 19
4. H. Toshiyoshi, D. Miyauchi, H. Fujita: Electromagnetic torsion mirrors for self-aligned fiber-optic crossconnectors by silicon micromaching. IEEE J. Sel. Top. Quant. Electron. 5, 10 (1999)
5. W.G. Wu, D.C. Li, W. Sun, Y.L. Hao, G.Z. Yan, S.J. Jin: Fabrication and characterization of torsion-mirror actuators for optical networking applications, Sensors and Actuators A: Physical 108, 175 (2002)