Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
http://link.springer.com/content/pdf/10.1007/BF02484259.pdf
Reference21 articles.
1. Peterson KE. Silicon as a mechanical material.Proceedings of the IEEE, 1982, 70(5): 420–457
2. Qian J, Zhao YP. Materials selection in mechanical design for microsensors and microactuators.Materials & Design, 2002, 23(7): 619–625
3. Shoji S, Esashi M. Microflow devices and systems.J Micromech Microeng, 1994, 4: 157–171
4. Nguyen NT. Micromachined flow sensors—a review.Flow Meas Instrum, 1997, 8(1): 7–16
5. Van Putten AFP, Middelhoek S. Integrated silicon anemometer.Electronic Letters, 1974, 10: 425–426
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