1. Committee on Technology National Science and Technology Council, “National Nanotechnology initiative: Leading to the next industrial revolution, Washington D. C. 2000.
2. Snowdon K, Mcneil C, Lakey J. Nanotechnology for MEMS components. mstNews 2001; (3): 9–10.
3. EI-Fatatry A, Correial A. Nanotechnology in Microsystems: potential influence for transmission systems and related applications. mstNews 2003; (3): 25–26.
4. Werner M, Köhler T, Grünwald W. Nanotechnology for applications in microsystems. mstNews 2001; (3): 4–7.
5. El-Hofy H, Khairy A, Masuzawa T, McGeough J. Introduction. In: McGeough J eds. Micromachining of Engineering Materials. New York: Marcel Dekker, 2002.