Author:
Tezuka Meguru,Yajima Tatsuhiko
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry
Reference15 articles.
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5. M. Teztika, T. Yajima. and A. Tsuchiya,Advances in Low-Temperature Plasma Chemistry, Technology, Applications, Vol. 1, H. V. Boenig, ed., Technomic Publishing Co. (1984), pp. 365.
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