1. Madou MJ (2011) Fundamentals of microfabrication and nanotechnology, 3rd edn. CRC Press, Boca Raton, FL
2. Brodie I, Muray JJ (1992) The physics of micro/nano-fabrication. Plenum, New York
3. Wolf S, Tauber RN (1999) Silicon processing for the VLSI Era. Process technology, vol 1. Lattice Press, Sunset Beach, CA
4. Campbell SA (2007) Fabrication engineering at the micro and nanoscale. Oxford University Press, New York
5. Ghandhi SK (1994) VLSI fabrication principles. Wiley, New York