State-of-the-Art for Nanomanufacturing Using Ion-Beam Technology
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Publisher
Springer London
Link
http://link.springer.com/content/pdf/10.1007/978-1-4471-4976-7_62-1
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5. Caturla M, Rubia TD, Marqués LA, Gilmer GH (1996) Ion-beam processing of silicon at keV energies: a molecular-dynamics study. Phys Rev B Condens Matter 54:16683–16695
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