Ion Beam Instruments Used for Nanomanufacturing-Reference-Cited by-同舟云学术

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Ion Beam Instruments Used for Nanomanufacturing

Published:2013 Issue: Volume: Page:1-22
ISSN:
Container-title:Handbook of Manufacturing Engineering and Technology
language:
Short-container-title:

Author:

Li Wuxia,Gu Changzhi

Publisher

Springer London

Link

http://link.springer.com/content/pdf/10.1007/978-1-4471-4976-7_63-4

Reference13 articles.

1. Cui Z (2005) Micro-nanofabrication technologies and applications. Higher Education Press, Beijing, pp 131–156

2. Edinger K, Yun V, Melngailis J, Orloff J, Magera G (1997) Development of a high brightness gas field ion source. J Vac Sci Technol B 15:2365–2368. doi:10.1116/1.589648

3. http://www.4waveinc.com/dslans.html

4. http://www.fei.com/products/dualbeams/helios-nanolab.aspx

5. http://www.ionbeammilling.com/ABOUT_THE_ION_MILLING_PROCESS

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultraprecision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies;Encyclopedia of Nanotechnology;2016

2. Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies;Encyclopedia of Nanotechnology;2015

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