Focused Ion Beam Nanofabrication Technology
Author:
Publisher
Springer London
Link
http://link.springer.com/content/pdf/10.1007/978-1-4471-4670-4_66
Reference57 articles.
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3. Arshak K, Mihov M, Arshak A, McDonagh D and Sutton D (2004) Novel dry-developed focused ion beam lithography scheme for nanostructure applications Microelectron Eng 73–74, 144–51
4. Breaux GA, Benirschke RC, Sugai T, Kinnear BS, Jarrold MF (2003) Hot and solid gallium clusters: too small to melt. Phys Rev Lett 91:215508
5. Chih JL, Aref T, Bezryadin A (2006) Fabrication of symmetric sub-5 nm nanopores using focused ion and electron beams. Nanotechnology 17:3264–3267
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