Hybrid controller for precision positioning application
Author:
Funder
Central Mechanical Engineering Research Institute, Council of Scientific and Industrial Research
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s12046-020-1323-6.pdf
Reference20 articles.
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3. Hwang C-L, Che Y-M, Sin J. K. O. and Jan C 2005 Trajectory tracking of large-displacement piezoelectric actuators using a nonlinear observer based variable structure control. IEEE Trans. Control Syst. Technol. 13: 56–66
4. Liu H, Lu B, Ding Y, Tang Y and Li D 2003 A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation. Inst. of Physics Publishing, J. Micromech. Microeng. 13
5. Salapaka S, Sebastien A, Cleveland J P and Salapaka M V 2002 High bandwidth nano-positioner: a robust control approach. Rev. Sci. Instrum. 73: 3232-3241
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