Design and characterization of in-plane MEMS yaw rate sensor-Reference-Cited by-同舟云学术

Design and characterization of in-plane MEMS yaw rate sensor

Published:2009-08 Issue:4 Volume:34 Page:633-642
ISSN:0256-2499
Container-title:Sadhana
language:en
Short-container-title:Sadhana

Author:

Venkatesh K. P.,Patil Nishad,Pandey Ashok Kumar,Pratap Rudra

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

http://link.springer.com/content/pdf/10.1007/s12046-009-0027-8.pdf

Reference11 articles.

1. Alper S, Akin T 2002 A symmetric surface Micromachined gyroscope with decoupled oscillation modes. Sensors and Actuators A97–98: 347–358

2. Andojo Ongkodjojo, Francis E H Tay 2005 Characterization of micromached devices using planar motion analyzer (PMA). Proc. IEEE SENSORS’2005 30: 361–364

3. ANSYS Ver 10 2004 Finite Element Solver for Multiphysics Problems. URL: http://www.ansys.com

4. Bao M H 2000 Resonant sensors and vibratory gyroscopes: Chapter 9 Handbook of Sensors and Actuators, (Amsterdam: Elsevier)

5. Fedder G K 1994 Simulation of microelectomechanical systems. Ph.D thesis, University of California

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