MOEMS-Enabled Miniaturized Biomedical Sensing and Imaging System
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-030-79749-2_8
Reference20 articles.
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5. Choi, J., Qiu, Z., Rhee, C.-H., Wang, T., & Oldham, K. (2014). A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement. Journal of Micromechanics and Microengineering, 24(7), 075017.
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