Composite Micro-Machining Technology on the Non-Silicon MEMS

Author:

Sun Yunna,Ding Guifu,Wang Yan,Yang Zhuoqing

Publisher

Springer International Publishing

Reference60 articles.

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2. Beeby, S. P., Torah, R. N., Tudor, M. J., Glynnejones, P., O'Donnell, T., Saha, C. R., et al. (2007). A micro electromagnetic generator for vibration energy harvesting. Journal of Micromechanics and Microengineering, 17(7), 1257–1265.

3. Bhattacharyya, B., Mitra, S., & Boro, A. K. (2002). Electrochemical machining: New possibilities for micromachining. Robotics and Computer-Integrated Manufacturing, 18(3–4), 283–289.

4. Cammarano, A., Burrow, S. G., & Barton, D. A. W. (2010). An energy harvester with Bistable compliance characteristics. In ASME 2010 international design engineering technical conferences and computers and information in engineering conference (pp. 725–732).

5. Chang, H. K., & Kim, Y. K. (2000). UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole. Sensors and Actuators A: Physical, 84(3), 342–350.

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