Vacuum Gripper-Based Practical Method of Gentle Deposition of Living Cells and Its Filter Substrates onto SiN Films for Electron Beam Irradiation Experiments
Author:
Publisher
Springer Nature Switzerland
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-54450-7_20
Reference10 articles.
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2. Inami, W., Nakajima, K., Miyakawa, A., Kawata, Y.: Electron beam excitation assisted optical microscope with ultra-high resolution. Opt. Express 18(12), 12897–12902 (2010)
3. Inami, W., Horiba, D., Kawata, Y.: Cell stimulation by focused electron beam of atmospheric SEM. Ultramicroscopy 206, 112823 (2019)
4. Merle, B., Göken, M.: Fracture toughness of silicon nitride thin films of different thicknesses as measured by bulge tests. Acta Materialia 59(4), 1772–1779 (2011). ISSN 1359-6454
5. Yang, J., Paul, O.: Fracture properties of LPCVD silicon nitride thin films from the load–deflection of long membranes. Sens. Actuators A: Phys. 97–98, 520–526 (2002). ISSN 0924-4247
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