1. Ghandhi SK (1994) VLSI fabrication principles: silicon and gallium arsenide, 2nd edn. Wiley
2. Plummer JD, Deal M, Griffen PB (2000) Silicon VLSI technology: fundamentals, practice and modeling. Pearson Education
3. Sze S (1988) VLSI technology. McGraw-Hill
4. Madou MJ (2011) Fundamentals of microfabrication and nanotechnology. CRC Press
5. Senturia SD (2001) Microsystem design. Springer