MEMS Resonators: Numerical Modeling
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-41057-5_94
Reference13 articles.
1. Lam, C.S.: A review of the recent development of MEMS and crystal oscillators and their impacts on the frequency control products industry. In: Proceedings of the IEEE Ultrasonics Symposium, pp. 694–704, Beijing, China, 2–5 November 2008
2. Varshni, Y.P.: Temperature dependence of the elastic constants. Phys. Rev. B 2, 3952–3958 (1970)
3. Okada, Y.: Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K. J. Appl. Phys. 56, 314 (1984)
4. Maycock, P.D.: Thermal conductivity of silicon, germanium, III-V compounds and III-V alloys. Solid-State Electron. 10, 161–168 (1967)
5. Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J., Pekko, P.: Determination of doping and temperature dependent elastic constants of degenerately doped silicon from MEMS resonators. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 61(7), 1063–1074 (2014)
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