Author:
Lasagni Andrés Fabián,Mulko Lucinda,Soldera Marcos
Publisher
Springer International Publishing
Reference84 articles.
1. A.F. Lasagni, T. Kunze, M. Bieda, D. Günther, A. Gärtner, et al., Proc. SPIE 9735, 973515 (2016)
2. H. van Wolferen, L. Abelmann, Lithography: Principles, Processes and Materials (Nova Science Publishers Inc, New York, 2011) ISBN: 978-1-61761-837-6
3. A.F. Lasagni, B.S. Menéndez-Ormaza, Adv. Eng. Mater. 12, 54–60 (2010)
4. J.H. Seo, J.H. Park, Z. Ma, J. Choi, B.K. Ju, J. Nanosci. Nanotechnol. 14, 1521–1532 (2014)
5. C.J.M. van Rijn, J. Micro/Nanolithogr. MEMS MOEMS 5, 011012 (2006)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献