1. Shikulskaya, O., Petrova, I., Shikulskiy, M.: The methods analysis of achievement of the required operational characteristics of microelectronic pressure sensors. Int. J. Eng. Sci. Res. Technol. (IJESS7) 6(4), 347–354 (2017)
2. Balzar, R., Krasnogenov, E., Abbasov, S.: Semiconductor vibrational frequency response sensor for pressure measurement. Phys. Tech. High Press. 2, 25–27 (1993). Pap. 30 Annu. Meet. Eur. High Pressure Res. group
3. Bao, M.-H., Yu, L.-Z., Wang, Y.: Micromachined beam-diaphragm structure improves performances of pressure transducer. In: Transducers 1989: Proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Montreux, Lausanne, vol. 2, pp. 137–141, 25–30 June 1989
4. Bai-zar, R., Voronin, V., Krasnogenov, E., Bogdanova, N.: Operation of monocrystalline silicon resonator in a measuring circuit. Sens. Actuators A 30(1–2), 175–178 (1991). Pap. East-West Workshop Microelectron. Sens, Sozopol
5. Zook James, D., Burns David, W.: Resonant gauge with microbeam driven in constant electric field. Patent 5275055 USA. Honeywell Inc. - No 937068; Appl. 31.08.92; publish 04.01.94