Silicon Nitride Metalenses at Near-Infrared Wavelengths Manufactured Using Deep-Ultraviolet Scanner Lithography
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Publisher
Springer Nature Switzerland
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-63378-2_52
Reference10 articles.
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2. Zhang, L., et al.: High-Efficiency, 80 mm Aperture Metalens Telescope. Nano Lett. 23(1), 51–57 (2023)
3. Park, J.S., et al.: All-glass, large metalens at visible wavelength using deep-ultraviolet projection lithography. Nano Lett. 19(12), 8673–8682 (2019)
4. Zhan, A., Colburn, S., Trivedi, R., Fryett, T.K., Dodson, C.M., Majumdar, A.: Low-contrast dielectric metasurface optics. ACS Photonics 3(2), 209–214 (2016)
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