Agile Simulation Model of Semiconductor Manufacturing

Author:

Stogniy Igor,Kruglov Mikhail,Ovsyannikov Mikhail

Publisher

Springer International Publishing

Reference17 articles.

1. Wang, L., Wang, G.: Big data in cyber-physical systems, digital manufacturing and industry 4.0. Int. J. Eng. Manuf. (IJEM) 6(4), 1–8 (2016)

2. Anitha, P., Patil, M.M.: A review on data analytics for supply chain management: a case study. Int. J. Inf. Eng. Electron. Bus. (IJIEEB) 10(5), 30–39 (2018)

3. Al-Samawi, Y.: Digital firm: requirements, recommendations, and evaluation the success in digitization. Int. J. Inf. Technol. Comput. Sci. (IJITCS) 1, 39–49 (2019)

4. Van der Zee, D.J.: Model simplification in manufacturing simulation – review and framework. Comput. Ind. Eng. 127, 1056–1067 (2019)

5. Sprenger, R., Rose, R.: On the simplification of semiconductor wafer factory simulation models. In: Robinson, S., Brooks, R., Kotiadis, K., van der Zee, D.J. (eds.) Conceptual Modeling for Discrete-Event Simulation, pp. 451–470. CRC Press Taylor&Francis Group, Boca Raton (2010)

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