Wavefront Sensor in Measurements of MEMS Vibrations

Author:

Józwik Michał,Nagarajan Dinesh Raja

Publisher

Springer International Publishing

Reference13 articles.

1. Zavalova, V.Y., Kudryashov, A.V.: Shack-Hartmann wavefront sensor for laser beam analyses. Proc. SPIE 4493, 277–284 (2002)

2. Józwik, M., Kukołowicz, R., Markiewicz, Z.: Wavefront reconstruction from two lateral shearing interferograms with Hilbert-Huang transform in monitoring of high power laser beam quality. Proc. SPIE 10834, 1083413-1–1083413-7 (2018)

3. Neal, D.R., Gruetzner, J.K., Roller, J.P.: Use of beam parameters in optical component testing. Proc. SPIE 4451, 394–405 (2001)

4. Cha, J.W., Ballesta, J., So, P.T.C.: Shack-Hartmann wavefront-sensor-based adaptive optics system for multiphoton microscopy. J. Biomed. Opt. 15(4), 046022 (2010)

5. Wyant, J.C., Creatch, K.: Basic wavefront aberration theory for optical metrology. Appl. Opt. Opt. Eng. 11(1), 28–39 (1992). Academic Press

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