Universal Complex Model for Estimation the Beam Current Density of High Voltage Glow Discharge Electron Guns

Author:

Melnyk IgorORCID,Tyhai SergeyORCID,Pochynok AlinaORCID

Publisher

Springer International Publishing

Reference24 articles.

1. Feinaeugle, P., Mattausch, G., Schmidt, S., Roegner, F.H.: A new generation of plasma-based electron beam sources with high power density as a novel tool for high-rate PVD. In: Society of Vacuum Coaters, 54th Annual Technical Conference Proceedings, Chicago, pp. 202–209 (2011)

2. Mattausch, G., et al.: Gas discharge electron sources – proven and novel tools for thin-film technologies. Elektrotech. Electron. 49(5–6), 183–195 (2014)

3. Grechanyuk, M.I., Melnyk, A.G., Grechanyuk, I.M., et al.: Modern electron beam technologies and equipment for melting and physical vapor deposition of different materials. Elektrotech. Electron. (E + E) 49(5–6), 115–121 (2014)

4. Ladokhin, S.V., et al.: Electron Beam Melting in the Foundry Production. Stal, Kyiv (2007). (in Russian)

5. Novikov, A.A.: High Voltage Glow Discharge Electron Sources With Anode Plasma. Energoatomizdat, Moscow (1983). (in Russian)

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