Deposition and Characterization of Magnetron Sputtered AlN Coatings with Variable Stoichiometry
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Publisher
Springer Nature Switzerland
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-43210-1_20
Reference27 articles.
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2. Akiyama M, Morofuji Y, Kamohara T, Nishikubo K, Tsubai M, Fukuda O, Ueno N (2006) Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films. J Appl Phys 100(11):114318. https://doi.org/10.1063/1.2401312
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5. Bu N, Ueno N, Fukuda O (2007) Monitoring of respiration and heartbeat during sleep using a flexible piezoelectric film sensor and empirical mode decomposition. In: 2007 29th annual international conference of the IEEE engineering in medicine and biology society. IEEE, pp 1362–1366. https://doi.org/ 10.1109/IEMBS.2007.4352551
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