1. Bryzek, J., Peterson, K., McCulley, W.: Micro-machines on the march. IEEE Spectr. 31(5), 20–31 (1994)
2. Brown, E.R.: RF-MEMS switches for reconfigurable integrated circuits. IEEE Trans. MTT. 46, 1868–1880 (1998)
3. Larson, L.E., Hackett, R.H., Melendes, M.A., Lohr, R.F.: Micromachined microwave actuator (MIMAC) technology-a new tuning approach for integrated microwave circuits. In: IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium., Boston, MA, USA, pp. 27–30 (1991)
4. Rebeiz, G.M.: RF Mems Theory, Design and Technology. Wiley, New Jersey (2014)
5. Ruby, R.C., et al.: High-Q FBAR filters in a wafer-level chip-scale package. In: IEEE International Solid-State Circuits Conference, San Francisco, CA, USA, pp. 184–458 (2002)