Influence of the Driving Frequency on Electrostatic Linear Comb Actuator Displacement Amplitude
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-04792-4_50
Reference16 articles.
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4. Pham, P.H., Dang, L.B., Nguyen, V.H., Dau, V.T.: Development of new electrostatic micro cam system driven by elastic wings. Microsyst. Technol. 23(12), 5669–5675 (2017)
5. Khan, F., Bazaz, S.A., Sohail, M.: Design, implementation and testing of electrostatic SOI MUMPs based microgripper. Microsyst. Technol. 16(11), 1957–1965 (2010)
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