Deflection Angle Detection of the Rotor and Signal Processing for a Novel Rotational Gyroscope
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-00557-3_23
Reference16 articles.
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2. Liu, K., et al.: The development of micro-gyroscope technology. J. Micromech. Microeng. 19, 113001 (2009)
3. Xia, D., Yu, C., Kong, L.: The development of micromachined gyroscope structure and circuitry technology. Sensors 14, 1394–1473 (2014)
4. Saukoski, M., Aaltonen, L., Halonen, K.A.I.: Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sens. J. 7, 1639–1651 (2007)
5. Elsayed, M., Nabki, F., Sawan, M., El-Gamal, M.: A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6°/√hr mechanical noise and drive-sense crosstalk minimization. In: Proceedings of the 2011 International Conference on Microelectronics (ICM), Hammamet, Tunisia, 19–22 December 2011, pp. 1–5 (2011)
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