Computer Simulation of Abnormal Glow Discharge in an Inverse Magnetron Sputtering System with Axial Plasma Flows
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Springer International Publishing
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http://link.springer.com/content/pdf/10.1007/978-3-030-66717-7_47
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1. Computer Simulation of Abnormal Glow Discharge in Inverse Magnetron Sputtering Systems with Sectioned Cathode Units;Integrated Computer Technologies in Mechanical Engineering - 2021;2022
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