Publisher
Springer International Publishing
Reference22 articles.
1. Hitachi, Semiconductor Manufacturing Process (2022), https://www.hitachi-hightech.com/global/products/device/semiconductor/process.html
2. T.C. Chen, Y.C. Wang, Y.C. Lin, A fuzzy-neural system for scheduling a wafer fabrication factory. Int. J. Innov. Comput. Inf. Control 6(2), 687–700 (2010)
3. T. Chen, Y.-C. Wang, A fuzzy-neural approach for supporting three-objective job scheduling in a wafer fabrication factory. Neural Comput. Appl. 23(1S), 353–367 (2013)
4. J. Ma, H. Chen, Y. Zhang, H. Guo, Y. Ren, R. Mo, L. Liu, A digital twin-driven production management system for production workshop. Int. J. Adv. Manuf. Technol. 110(5), 1385–1397 (2020)
5. A. Koulouris, N. Misailidis, D. Petrides, Applications of process and digital twin models for production simulation and scheduling in the manufacturing of food ingredients and products. Food Bioprod. Process. 126, 317–333 (2021)
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