Adaptive Threshold Processing of Secondary Electron Images in Scanning Electron Microscope
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-030-27526-6_15
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4. Würtz, P., Gericke, T., Vogler, A., et al.: Image formation in scanning electron microscopy of ultracold atoms. Appl. Phys. B: Lasers Opt. 98(4), 641–645 (2010)
5. Midoh, Y., Miura, K., Nakamae, K., et al.: Statistical optimization of Canny edge detector for measurement of fine line patterns in SEM image. Meas. Sci. Technol. 16(2), 477–487 (2005)
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