Photo-Microlithography Fabrication of the Parts of a Micro-Mechanical Calculator-Reference-Cited by-同舟云学术

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Photo-Microlithography Fabrication of the Parts of a Micro-Mechanical Calculator

Published:2020 Issue: Volume: Page:21-39
ISSN:2193-9691
Container-title:Building and Probing Small for Mechanics
language:
Short-container-title:

Author:

Bourgerette Christian,Noé Laure,Pinaud Sebastien,Joachim Christian

Publisher

Springer International Publishing

Link

http://link.springer.com/content/pdf/10.1007/978-3-030-56777-4_3

Reference5 articles.

1. Bustillo, J.M., Howe, R.T., Muller, R.S.: Surface micromachining for microelectromechanical systems. Proc. IEEE. 86, 1552–1574 (1998)

2. Cui, D.D., Zhang, L.C.: Nano-machining of materials: understanding the process through molecular dynamics simulation. Adv. Manuf. 5, 20–34 (2017)

3. Keller, S., Blagoi, G., Lillemose, M., Haefliger, D., Boisen, A.: Processing of thin SU-8 films. J. Micromech. Microeng. 18, 125020 (2008)

4. Deng, J., Troadec, C., Kim, H.K., Joachim, C.: Direct transfer of Au nano-islands from a MoS2 stamp to an SiH surface. J. Vac. Sci. Tech. B. 28, 484 (2010)

5. Yang, J., Deng, J., Troadec, C., Ondarcuhu, T., Joachim, C.: Solid-state SiO2 nano-gears AFM tip manipulation on HOPG. Nanotechnology 25, 465305 (2014)

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Towards a Molecular Mechanical Calculator;Advances in Atom and Single Molecule Machines;2022-11-14

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