Determination of Reactant Gases Mass Balance in the Process of Deposition of Ionic-Plasma Coatings

Author:

Diadiun KaterinaORCID

Publisher

Springer International Publishing

Reference17 articles.

1. Vereshchaka, A.S., Tretiakov, I.P.: Cutting tool with wear resistant coatings. Engineering, Moscow (1986). (in Russian)

2. Dytnerskiy, Yu.I.: Processes and equipment of chemical technology. Chemistry, Moscow (1995). (in Russian)

3. Boxman, R.L.: Vacuum arc deposition: early history and resent developments. In: Proceedings of the XIXth ISDEIV, Xi’an. Journal 9, pp. 57–82 (2002)

4. Mattox, D.M.: The History of Vacuum Coating Technology. Albuquerque, NM, USA (2002)

5. Tonkonogiy, V.M.: Reactant gas supply control while depositing of ion-plasma coatings with forecasting of the vacuum units non – hermeticity. Refrig. Technol. 3(89), 70–73 (2004)

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