1. Maluf N, Williams K (2004) An introduction to microelectromechanical systems engineering, 2nd edn. Artech House, Boston
2. Madou M (2011) Fundamentals of microfabrication and nanotechnology, 3rd edn. CRC Press, Boca Raton
3. Wolf S, Tauber RN (2000) Silicon processing for the VLSI era, Vol. 1: process technology, 2nd edn. Lattice Press, Sunset Beach
4. Ghodssi R, Lin P (eds) (2011) MEMS materials and process reference handbook. Springer, New York
5. Tilli M, Paulasto-Korchel M, Petzold M, Theuss H, Motooka T, Lindroos V (eds) (2020) Handbook of silicon based MEMS materials and technologies. Elsevier, Amsterdam