Wafer-to-Wafer Bonding

Author:

Oggioni Laura,Garavaglia Matteo,Seghizzi Luca

Publisher

Springer International Publishing

Reference17 articles.

1. Gosele, U., Stenzel, H., Reiche, M., Martini, T., Steinkirchner, H., & Tong, Q.-Y. (1996). History and future of semiconductor wafer bonding. Solid State Phenomena, 47–48, 33–44.

2. Tong, Q.-Y., & Gösele, U. (1998). SemiConductor wafer bonding: Science and technology. Wiley-Interscience. ISBN:978-0-471-57481-1

3. PloÈûl, A., & KraÈuter, G. (1998). Wafer direct bonding: Tailoring adhesion between brittle materials. Max-Planck-Institut fuÈr Mikrostrukturphysik. Accepted 12 October 1998.

4. Wallis, G., & Pomerantz, D. I. (1969). Field assisted glass-metal sealing. Journal of Applied Physics, 40(10), 3946–3949. https://doi.org/10.1063/1.1657121. Bibcode:1969JAP....40.3946W

5. Plach, T., Hingerl, K., Tollabimazraehno, S., Hesser, G., Dragoi, V., et al. (2013). Mechanisms for room temperature direct wafer bonding. Journal of Applied Physics, 113, 094905. https://doi.org/10.1063/1.4794319

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