Multilayer Piezo-Ceramic Actuators and Their Applications

Author:

Takahashi Sadayuki

Publisher

Birkhäuser Basel

Reference9 articles.

1. Higuchi, T., et al., 1990: Proc. IEEE Micro Electro Mechanical Systems, California, 222.

2. Honmou, H., et al., 1985: Jpn. J. Appl. Phys., 24 Suppl. 24-3, 187.

3. Sugita, Y., et al., 1987: Proc. Jpn. Soc. Mech. Eng., No. 870-3, p. 119, [in Japanese].

4. Takahashi, S., et al., 1983: Ferroelectrics, 50, 181.

5. Takahashi, S., 1985: Jpn. J. Appl. Phys., 24 Suppl. 24-2, 41.

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