1. Higuchi, T., et al., 1990: Proc. IEEE Micro Electro Mechanical Systems, California, 222.
2. Honmou, H., et al., 1985: Jpn. J. Appl. Phys., 24 Suppl. 24-3, 187.
3. Sugita, Y., et al., 1987: Proc. Jpn. Soc. Mech. Eng., No. 870-3, p. 119, [in Japanese].
4. Takahashi, S., et al., 1983: Ferroelectrics, 50, 181.
5. Takahashi, S., 1985: Jpn. J. Appl. Phys., 24 Suppl. 24-2, 41.