Deposition and Characterization of Magnetron Sputtered TiN Coatings with Variable Stoichiometry-Reference-Cited by-同舟云学术

Deposition and Characterization of Magnetron Sputtered TiN Coatings with Variable Stoichiometry

Published:2024 Issue: Volume: Page:85-94
ISSN:2662-3161
Container-title:Springer Proceedings in Materials
language:en
Short-container-title:

Author:

Nikolaev Andrey L.^ORCID,Lapitskaya Vasilina A.^ORCID,Sadyrin Evgeniy V.^ORCID,Antipov Pavel E.^ORCID,Kharchevnikov Ivan O.^ORCID,Volkov Sergey S.^ORCID

Publisher

Springer Nature Switzerland

Link

https://link.springer.com/content/pdf/10.1007/978-3-031-52239-0_9

Reference35 articles.

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2. Ghailane, A., Makha, M., Larhlimi, H., Alami, J.: Design of hard coatings deposited by HiPIMS and dcMS. Mater. Lett. 280, 128540 (2020). https://doi.org/10.1016/j.matlet.2020.128540

3. Sadyrin, E.V. et al.: Nanoindentation derived mechanical properties of TiN thin film deposited using magnetron sputtering method. In: Altenbach, H., Eremeyev, V.A., Igumnov, L.A., Bragov, A. (eds.) Deformation and Destruction of Materials and Structures Under Quasi-static and Impulse Loading. Advanced Structured Materials, vol. 186, pp. 245–254. Springer, Cham (2023). https://doi.org/10.1007/978-3-031-22093-7_17

4. Kainz, C., Schalk, N., Tkadletz, M., Mitterer, C., Czettl, C.: Microstructure and mechanical properties of CVD TiN/TiBN multilayer coatings. Surf. Coat. Technol. 370, 311–319 (2019). https://doi.org/10.1016/j.surfcoat.2019.04.086

5. Lee, C.Y., Lin, S.J., Yeh, J.W.: (AlCrNbSiTi) N/TiN multilayer films designed by a hybrid coating system combining high-power impulse magnetron sputtering and cathode arc deposition. Surf. Coat. Technol. 468, 129757 (2023). https://doi.org/10.1016/j.surfcoat.2023.129757